TITLE	Development of manufacturing technology of multilayer thin film electrodes for all-solid high capacity batteries (Joint Program to Promote Technological Development with the Private Sectors)
AUTHOR	RITE-Itami No.5 LABORATORY in Sumitomo Electric Industries, Ltd
SOURCE
ABSTRACT	We are now developing a manufacturing technology of multilayer thin film electrodes for all-solid high capacity batteries in order to promote the hybrid electrical vehicles. (1) Multilayer forming technology Forming experiments using a vacuum deposition and pulsed laser deposition of positive active materials, solid-electrolyte materials and negative active materials have been conducted. As a result, properties and production rate of formed layers have been investigated. On the bases of those experimental results, we have designed a manufacturing equipment of multilayer thin film electrodes for all-solid high capacity batteries. (2) Interfacial properties controlling technology Treating of the interfacial regions between positive active layer and solid-electrolyte layer and/or between negative active layer and solid-electrolyte are crucial for realizing all-solid batteries. We have developed an etching method using Argon bombardment treating. (3) Film thickness controlling technology Film thickness measuring system using quartz-crystal oscillator method has been developed. (4) Performance evaluation technology for all-solid high capacity batteries Batteries using developed multilayer thin film electrodes have been evaluated. We found that the developed multilayer thin film electrodes are able to operate as an electrochemical battery. Alternating current impedance measuring of the battery has been also conducted. On the basis of above-mentioned activities, we determined the direction of this development so as to achieve the desired objective of this R&D program.