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Improvement of Processes Fabricating Thin Film Anodes for Lithium Secondary Batteries
(Joint Program to Promote Technological Development with the Private Sectors)

AUTHOR RITE - ITAMI NO.4 LABORATORY in SUMITOMO ELECTRIC INDUSTRIES, LTD.
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ABSTRACT Fabricating processes of thin film anodes for lithium secondary batteries was developed so as to realize a practical use of the thin film anodes which have ultimately highest energy density in the secondary batteries. This year (2006) was the last year of this three years project. Following results were obtained.

(1) Safety measures of the pilot equipment
Several hazardous materials which have a possibility to generate noxious fume in case of reaction with moisture were handled in the pilot equipment. Consequently, the control system for keeping the dryroom's dew point under -50Ž was installed. Also, it was introduced that the differential pressure exhaust system with the double wall in order to secure worker's safety even if the dew point rose at in case of emergency such as blackout. All prescribed specifications were successfully fulfilled.

(2) Equipment reinforcement for the long length and the rapid growth of the thin films
Heat shield mechanism between the evaporation sources was designed using computer-aided engineering process of thermal distribution calculation. Thermal interference of evaporation source at the solid electrolyte film growth and the temperature control was improved.

(3) Improvement of processes for the rapid growth of the thin films
Characteristic of the rapid growth of the thin films in changing a condition as a parameter at evaporation source injection power of electric and distance between evaporation source and matrix were examined. The active materials growth speed of 1.12ƒÊm/s and the solid electrolytes growth speed of 0.10ƒÊm/s were accomplished.

(4) Improvement of processes for the long length growth of the thin films
The matrix film transport system without a slip and meandering of the matrix was introduced into the pilot equipment. At the actual test run, transportation of 500m-length matrix without a slip and greater than 32mm of meandering of the matrix was successfully accomplished.
Based on the above-mentioned results, we recognized that the safe and stable fabricating technology was established and its mass production processing technology was ascertained.